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High-resolution syringe pump Product List

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【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.

The optimal solution for the needs of "uniform film thickness," "constant concentration of trace components," and "accurate liquid cut-off at the nozzle tip" in semiconductor manufacturing! Please consider our low-pulse, high-reproducibility syringe pump. ===== Overview ===== The Centris Pump is a compact syringe pump module with high accuracy, reliability, and reproducibility. Its simple yet robust mechanical design requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ===== Features ===== - Long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

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  • High-resolution syringe pump

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